RFID shelf for semiconductor fabs

  1. RFID
  2. RFID shelf for semiconductor fabs

The HERMOS RFID rack for semiconductor factories offers the possibility to equip lattice racks with RFID functionality. This solution is applicable for all common shelf types and sizes and allows retrofitting of existing WIP shelves. The antenna heads are mounted directly on the shelf and connected to a central RFID reader unit. The occupancy of a shelf location is detected by an integrated light sensor and an identification is performed automatically. Visualization at the shelf locations is provided by a multicolor LED or an e-ink display. The shelf status and stock changes can be displayed on a panel PC.

Touch panel PC (optional)
Status information, rack occupancy and other details can be displayed directly on the touch panel PC or transferred to the host.

Flexible configuration
The system is suitable for existing lattice racks and other rack types. It can be expanded modularly at any time. The number of rack locations and levels is flexible.

Ethernet and USB interface
Easy and uncomplicated integration due to the Ethernet interface

Process integration
Easy integration due to the support of the SEMI Equipment Communication Standard (SECS/HSMS).

Automatic data acquisition
Automatic reading and data forwarding provides continuous inventory control.

Event-controlled processes
ensure long component life.

E-Ink Displays
Detailed information can be displayed directly on an e-ink display

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Available variants and offers on demand
As standard, our HFM WIP racks are designed for 16, 32 and 40 rack spaces. Other variants and customer-specific configurations are available on request.

Optimize your workflows with RFID!

  • Automatic inventory recording
  • Capture of production processes
  • Optimization of material stocks and thus storage areas
  • Technology

    RFID HF Frequency 13.56 MHz (ISO 15693)

  • Components

    • Central reading unit, up to 32x
    • Special antenna heads, max. 32 pieces
    • Integrated antenna sensor and LED
    • E-Ink display (optional)
  • Functions

    • Detection of shelf occupancy by optical sensor
    • Automatic reading function and data transfer
    • Visualization by multicolor LEDs at the shelf location
    • Configurable test mode with optical display
    • Level detection can be implemented
  • Features

    • Easy RFID integration into existing shelves
    • independent of shelf type and size
    • LAN/WLAN interface
    • Supports SEMI Equipment Communication Standard (SECS)
  • HFM WIP Rack Reader - Customer Manual

    HFM WIP Rack Reader - Customer Manual



    Deutsch / English

  • HFM WIP Rack Reader - Application

    HFM WIP Rack Reader - Application



  • HFM WIP Rack Reader - Loader

    HFM WIP Rack Reader - Loader



  • HFM WIP Rack Reader - Device Discoverer

    HFM WIP Rack Reader - Device Discoverer



  • HFM WIP Rack Reader - Protocol Tester

    HFM WIP Rack Reader - Protocol Tester



  • HFM WIP Rack Reader - WIP Rack Simulator

    HFM WIP Rack Reader - WIP Rack Simulator



  • HFM WIP-Regal (Datasheet)

    HFM WIP-Regal (Datasheet)




Protocols SECS, SECS1, HSMS, customer protocol
Antenna portDepending on variant
Transmission frequency13.56 MHz, ISO15693
Transmitting power 1.1 W
Case materialStainless steel/PP
Protection class IP 40
Display E-Ink Display
Operating temperature 0 °C to 50 °C
Storage temperature -25 °C to 70 °C
Permissible humidity at 50 °C 25% to 80%
Current consumption80 mA / 300 mA (passive/aktive)
Voltage 24 VDC and PoE
Conformity Ce, RoHS, REACH