INSIDE THE TECHNOLOGY
SEMI E84 Integration
Reliable carrier transfer requires more than RFID identification.
The HERMOS LFM Reader E84 integrates RFID technology directly into the SEMI E84 Carrier Handoff process. Four dedicated E84 interfaces, automatic antenna tuning and support for external devices such as barcode readers or E-Ink displays enable stable communication between loadports and OHT systems.
Technical Highlights
• 4× E84 communication ports
• Automatic LF antenna tuning
• RFID, barcode & E-Ink support
• Optimized for AMHS integration
Built for reliable semiconductor material handling.
