A LOOK BEHIND THE TECHNOLOGY | RFID Transport Carts 📡
Traceability in Manual Wafer Transport.
In older semiconductor fabs, manual transport remains part of daily operations. The challenge: reliable batch ID as wafers move between production, transport, and storage.
The HERMOS RFID transport cart combines manual mobility with integrated RFID identification. It transports 150-mm, 200-mm, and 300-mm wafers, automatically identifies the batches, and shows relevant information on its integrated display.
The cart connects to the MES wirelessly, keeping data available throughout the material flow. A replaceable battery provides flexibility for mobile use.
Technical Highlights
– Integrated RFID identification
– Support for 150-mm, 200-mm, and 300-mm wafers
– Wireless MES communication
– Operation with a replaceable battery
Manual transport. Digital traceability.
